PRO-75/100 MBE Systems
PRO-75/100 MBE Systems
Professional Top-of-the-Line MBE Systems
The PRO-75/100 MBE-Systems are dedicated growth systems with a loadlock chamber and with an optional preparation/storage chamber. The substrate sizes are either 3” (PRO-75) or 4” (PRO-100). The systems of course also accept smaller samples (1” and 2”) and the Omicron standard sample plates.The carefully designed chamber with up to 12 effusion cells shows excellent thickness uniformity for all substrate sizes. The large effusion cell capacity of to 130 cm3 for layer growth increases the up-time of the system significantly.
The fast & reliable sample transfer together with the excellent performance results in a low cost of ownership. The optional available easy & intuitive to operate growth control software and the possibility to add standard Omicron analysis equipment makes this a unique MBE system for researchers.
Growth Applications
- Metal MBE growth
- Semiconductor growth (III-V, III-N, II-VI, SiGe)
- Magnetic materials growth
- Oxide MBE growth
- Organic MBE
Chamber Layout
Three standard versions of the deposition chamber, depending on the application, are available:
- A deposition chamber with a large top flange, with a cooling shroud and with ports for twelve effusion cells 7 x NW100CF (6“ O.D.) and 5 x NW63CF (4.5“ O.D.)
- A deposition chamber with a large top flange, with a cooling shroud, with ports for nine effusion cells 5 x NW100CF (6“ O.D.) and 4 x NW63CF (4.5“ O.D.) and one horizontally mounted e-beam evaporator port NW250CF (12“ O.D.)
- A deposition chamber with a large top flange, with a cooling shroud, with ports for seven effusion cells 4 x NW100CF (6“ O.D.) and 3 x NW63CF (4.5“ O.D.) and two horizontally mounted e-beam evaporator ports NW250CF (12“ O.D.)
A sample preparation and storage chamber with its own pumping system is also available. Due to the modular design of the EVO MBE-System this chamber can be retro-fitted also at a later stage.
- Accepts all standard Omicron small samples and 1” to 4” Substrates
- < 1% thickness homogenity for a 4” substrate
- Sample heating with up to T > 1470 K
- Twelve ports for effusion cells: 7 x NW100CF (6“ O.D.) and 5 x NW63CF (4.5“ O.D.) and one 4.5″ flange perpendicular to the sample for optical measurements
Or
- Nine/Seven ports for effusion cells: 5/4 x NW100CF (6“ O.D.) and 4/3 x NW63CF (4.5“ O.D.) plus one/two horizontally mounted e-beam evaporator ports NW200CF (10“ O.D.) and one 2.75″ flange perpendicular to the sample for optical measurements
- Vacuum base pressure < 1*10-10 mbar/torr, < 5*10-11 mbar/torr with Cryopump
- Standard chamber: 22“ diameter (559 mm) with 24.4” top flange (620mm O.D.)
Note: Specifications and descriptions contained in this website are subject to alteration without notice. For guaranteed specifications please inquire official documentation.
MBE Solutions- IC-MBE Systems