Lab10 MBE System
Lab10 MBE System
Universal Compact Laboratory MBE Systems
The Lab10 MBE system is a turnkey small sample research tool for innovative material development under UHV conditions.
This system is designed to fulfil the highest and most stringent requirements of modern thin film deposition. Furthermore, the small sample concept is intended to interface the MBE system with an UHV analysis module to offer the best platform for fundamental research of novel materials.
Lab10 MBE key characteristics:
- Research tool for innovative material development
- Configurable and customizable
- Low cost of ownership
- Growth process controlled by advanced software
- Defined interface to Scienta Omicron analysis systems
Deposition Chamber Concept
The deposition chamber of the Lab10 MBE is optimized for epitaxial growth of thin films on small sample sizes. Therefore, it is equipped with an efficient cryopanel, to reduce the heat load around the manipulator and the effusion cells. The large pumping ports allow high pumping speeds and are key for true ultra-high vacuum performance.The exchangeable bottom cluster flange can be equipped with a wide range of high quality effusion cells, cracker sources and electron beam evaporators. Additional ports for in-situ growth control and viewports are prepared.
Its proven chamber design with up to 8 effusion cells is revealed in an excellent thickness homogeneity for a 10×10 mm² substrate. The effusion cell capacity can range from 1 cm3 up to 35 cm3 for layer growth.
Software: MISTRAL & Evaporation Control
The Lab10 MBE includes the MISTRAL control system together with a powerful evaporation control software. The control system is based on certified standard components for supreme reliability and provides a graphical status overview of all sensor values. Integrated safety interlocks protect the UHV system in case of power failure or a drop in water flow.
The evaporation control softwareoffers a powerful script editor for programming individual process recipes. Additionally, 24/7 data logging of all relevant system parameters is included.
With this software bundle, experiments can be conducted under well-controlled and reproducible conditions.
Applications
The Lab10 MBE is designed for forefront research. It is a proven platform with more than thirty of such small-sample systems installed worldwide. Our customers use their systems for a variety of material systems, such as:- Topological Insulators
- 2D Materials, e.g. Transition metal dichalcogenides(TMDCs)
- Oxides
- Organics
- Intermetallic Compounds
- Semiconductors
- Heterostructures
- Thin Film Solar Cells
System Configurator
Applying our wide range of expertise, we can offer thebest possible solution for every intended purpose. Our local ScientaOmicron sales representativesare trained to assist you in the configuration of your individual system.
Experience how our visual configurator, based on real-time 3D technology, boosts the creation of your individual MBE system!
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| Vacuum tank: | Stainless steel | ||
| Pressure: | < 1×10-10 mbar | ||
| Pressure sensor: | Ion gauge | ||
| Cryopanel: | Included | ||
| Baking temperature: | 150 °C | ||
| Viewports: | Equipped with Viewport Shutters | ||
| Access Chamber: | Included | ||
| Software package: | Included | ||
| Preconfig. flanges: | RHEED | ||
| Quartz Micro Balance | |||
| Beam Flux Monitor | |||
| Quadrupole mass analyser (RGA) | |||
| Manipulator**: | 10 x 10 mm sample size | ||
| Temperature RT < T < 1170 K | |||
| X/Y- travel ± 8 mm | |||
| Z- travel 50 mm | |||
| Azimuthal rotation ± 180° | |||
| Provision to work with direct sample heating | |||
| Cluster flange: | 3x DN63CF | ||
| 4x DN40CF | |||
| 1x central DN40CF |
* Specifications for standard configuration. Customizations can influence specifications. Please contact us for details.
** Standard manipulator. Options for higher temperatures, LN2 cooling, oxygen resistance and continuous rotation are available.
Lab10 MBE System